Paramount

Product details

Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.

  • Full digital control for dynamic response to plasma changes
  • Customizable frequency from 400 kHz to 60 MHz and power from 1.5 to 10 kW
  • Advanced features for control optimization and synchronization


Datasheet