Process-Proven, Pulsed DC for Single-Magnetron Reactive Sputtering of Thin Dielectric Films
Pinnacle Plus+ generators deliver DC power in a pulsing configuration enabling reactive sputtering of extremely uniform, high-quality dielectric films.
- Charge clearing during the reverse pulse prevents arcs from developing
- Adjustable process through frequency and duty cycle control
- Compact air-cooled design expandable in primary/secondary configurations
Datasheet
