Low-Frequency Series with Enhanced Arc Control and Internal Load Matching for 40 kHz Reactive Sputtering Applications
The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications.
- Reliable water-cooled design
- Delivers tight output regulation on power, voltage, or current, with a measurement accuracy of 1%
- Compatible with a programmable logic controller (PLC)
Datasheet
