Advanced Dual-Magnetron Sputtering Accessories
A field-proven solution for any dual-magnetron sputtering application with additional capabilities facilitating advanced process innovation.
- Achieve higher deposition rates with a more stable process through advanced ARC management
- Tune your process with variable frequency and duty cycle
- Tailor to your system requirements: 30, 40, and 60 kW units configurable up to 180 kW
Datasheet
